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극자외선 리소그래피: 마이크로칩 제조의 한계를 뛰어넘다 2부 중 1부

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The development of mobile phones has brought great convenience to users. How can such a small device have so many functions? The answer lies in its sophisticated “brain” — a whole collection of microchips. Inside a chip are a large number of densely packed circuit elements, which can contain billions of transistors. The size of each transistor is approximately one thousandth to ten-thousandth of a hair’s breadth. How are these circuits made? The answer is through “microlithography.” On today’s show we’ll introduce the advanced next-generation lithography technology—Extreme UV Lithography.